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Variability and reliability analysis of CNFET technology: Impact of manufacturing imperfections

机译:CNFET技术的可变性和可靠性分析:制造缺陷的影响

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摘要

Carbon nanotube field-effect transistors (CNFETs) are promising candidates to substitute silicon transistors. Boasting extraordinary electronic properties, CNFETs exhibit characteristics rivaling those of state-of-the-art Si-based metal-oxide-semiconductor field-effect transistors (MOSFETs). However, as any technology that is in development, CNFET fabrication process still have some imperfections that results in carbon nanotube variations, which can have a severe impact on the devices' performance and jeopardize their reliability (in this work the term reliability means time-zero failure due to manufacturing variations). This paper presents a study of the effects on transistors of the main CNFET manufacturing imperfections, including the presence of metallic carbon nanotubes (m-CNTs), imperfect m-CNT removal processes, chirality drift, CNT doping variations in the source/drain extension regions, and density fluctuations due to non-uniform inter-CNT spacing.
机译:碳纳米管场效应晶体管(CNFET)有望替代硅晶体管。 CNFET具有非凡的电子性能,其特性可与最新的基于Si的金属氧化物半导体场效应晶体管(MOSFET)相媲美。但是,正如正在开发的任何技术一样,CNFET的制造工艺仍存在一些缺陷,会导致碳纳米管发生变化,这可能会对器件的性能产生严重影响并损害其可靠性(在这项工作中,可靠性一词意味着零时限。因制造差异而导致的故障)。本文介绍了对主要CNFET制造缺陷对晶体管的影响的研究,包括金属碳纳米管(m-CNT)的存在,不完善的m-CNT去除工艺,手性漂移,源极/漏极扩展区中CNT掺杂的变化以及由于CNT间间距不均匀而导致的密度波动。

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